简述
The EV-S Series pumps are energy efficient vacuum pumps for clean to light duty processes such as Load Lock, SEM, PVD, Ashing, Ion Implant and Etch. The EV-S Series provides pumping speeds from 58 to 710 CFM with an ultimate pressure as low as 3 mTorr.
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Ebara EV-S50P真空泵维修
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